By Norman R. Scott
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Note that the sensor is a microstructure, but the hybridization phenomenon is at the nanoscale level. Fig. 2. 16 Crosslinking in C60 and Derivatisation The treatment of fullerene films on silicon substrates with 1,8-octanediamine vapor at ca. 120°C produces insoluble polymeric films. They are similar in stability to photopolymerised C60 films for potential photovoltaic and Nanocell applications, but the undesirable formation of other carbonaceous phases can be 1 Introduction 17 avoided. The solvent-free (gas-phase) treatment with amines under temperatures of ca.
This in turn led to the measurement of the temperature uniformity and the time constant for about 20 vessels in a micromachined silicon array. 1oC. While the thermometry technique described above is useful for characterising microfabricated PCR systems, it can also support thermal designs of a broad variety of MEMS fluidic devices. Fig. 5. (a) Liquid-crystal thermometry based micromachined vessel array for thermal processing of DNA using polymerase chain reaction (PCR) (Source: Woudenberg and Albin, Perkin Elmer Applied Biosystems) Thermally activated systems are mostly employed in the bio-analytical microsystems or lab-on-a-chip (loac) devices.
The sequences of microfabrication include film growth, doping, lithography, etching, dicing and packaging. A polished silicon wafer is mainly used as the substrate. A thin film is grown on the substrate. Then the properties of the layer are modulated by appropriately introducing doped material in a controllable manner. The doping can be achieved by thermal diffusion. The subsequent process is called lithography, which refers to the creation of a masking pattern. The pattern on a mask is transferred to the film by means of a photoresist.